We Handle All kinds of Remote Plasma Source.
Typical Models
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| NO | Maker | capacity | Model(Series) | |
|---|---|---|---|---|
| 1 | MKS | 2L | AX7657 AX7658 AX7650 AX7651 FI20620 |  |
| 2 | MKS | 3L | AX7670 |  |
| 3 | MKS | 4L | FI80130 |  |
| 4 | MKS | 5L | AX7690 |  |
| 5 | MKS | 6L | FI80133 FI80131 | |
| 6 | MKS | 8L | AX7685 FI80132 | |
| 7 | MKS | 15L | FI80146 AX7645 |   |
| 8 | MKS | 22L | AX7635 | |
| 9 | MKS | 30L | AX7665 |  |
RPS(Remote Plasma Souce)
