Tilter & Roplat

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Typical Models
NOSERIESEQUIPMENTSPictures
1E220/E500HPSOURCE HEAD
IMANIPULATOR
ROPLAT
TILTER
SET-UP CUP
SET-UP CUP(BELLOWS)
2-STEP REDUCER
ORIENT STAGE
TVL FARADAY(VARIAN)
TVL FARADAY(TEL)
ELEVATOR
VAPORIZER
GATE VALVE		REAL_CLICK
2VIISTA80/810SOURCE HEAD
MANIPULATOR(80)
MANIPULATOR(810)
ORIENT
X-TILTER
ROTATING MASS SLIT
BEAM GATE
PROFILER
ELEVATOR
PRI ROBOT ARM		REAL_CLICK
3VIISION80/200SOURCE HEAD(VIISION)
MANIPULATOR
ROTATING MASS SLIT
BEAM GATE
WAFER TRANSFER		REAL_CLICK
4E1000HPSOURCE HEAD(E1000/hp)
MANIPULATOR
SET-UP CUP
ACCEL TUBE
BEAMGATE		REAL_CLICK
5160XP/300XPSOURCE HEAD(300XP)
SOURCE HEAD(120/160XP)
SOURCE HOUSING
MANIPULATOR
NEUTRAL CUP
GATE VALVE
ISOLATION VALVE
SWING GATE VALVE		REAL_CLICK
6AXCELISSOURCE HEAD
MANIPULATOR
FLAG FARADAY
INJECT FLAG FARADAY
ELECTROSTATIC QUAD
CALMP RING ASSY
RESOLVER FLAG FARADAY
PLASMA SHOWER		REAL_CLICK
7GENUS1510/1520SOURCE HEAD
LOW LENS
HIGH LENS
LIFT MODIFY
ACCEL TUBE		REAL_CLICK
Tilter & Roplat

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